News Article
Heidelberg Instruments Receives Multiple Orders for Lithography Systems
Heidelberg Instruments, GmbH, Heidelberg, Germany, a supplier of direct write laser lithography systems, has announced order for two advanced VPG maskless lithography systems from an Asian based photomask production group.
First system, a VPG 1400, is the latest and most advanced large area production system by Heidelberg Instruments. VPG 1400 has a write area of 1.4 by 1.4 meters, and is configured to expose sub-micron structures at a high throughput with an address grid of 10 nm. The second system, a VPG 800, is capable of exposing an area of up to 800 mm by 800 mm.
"The VPG 1400 is another milestone in innovation by Heidelberg Instruments which with its wide range of capabilities will enable the end user to work on a number of applications. This order further solidifies the VPG technology as a leading solution for advanced photomask production groups." states Alexander Forozan, Head of Global Sales and Business Development
