News Article
Etch Tech 2012: Pushing the Limits
The Kavli Nanoscience Institute (KNI) at Caltech, USA and Oxford Instruments are excited to announce their joint Seminar and Workshop entitled Etch Tech 2012, taking place 16th-17th July in Pasadena, California. The event is open to all those people working in industry and academia with an interest in recent progress in research and development, plus future trends in the fabrication and application of micro & nano structures and devices.
Topics include Advances in Deep RIE / MEMS; OpSIS, Single Digit Nanoscale Fabrication; Optical and Electrical Probes; Silicon Nanowires and Novel Etch Techniques; Diamond Etching and Nanoscale Applications of ALD.
Following an introduction by Oxford Instruments Managing Director Dan Ayres, there will be talks from invited guest speakers, senior KNI Caltech and Oxford Instruments Plasma Technology specialists.
Speakers from Caltech, include Professor Oskar Painter, Executive Officer for Applied Physics and Materials Science and Co-Director, Kavli Nanoscience Institute, Caltech; Andrei Faraon Assistant Professor of Applied Physics and Materials Science; Rassul Karabalin, Senior Research Scientist, Condensed Matter Physics at Caltech; Sameer Walavalkar, Postoctoral Scholar in Physics, Caltech. Guest speakers include Dr Deirdre Olynick, Nanofabrication Facility, Lawrence Berkeley National Lab and Professor Michael Hochberg, Electrical and Chemical Engineering, University of Delaware.
As a leading manufacturer of plasma processing systems, Oxford Instruments has Process Applications and Technology teams who are highly experienced and qualified, with many years experience. They will offer talks on various aspects of plasma etch and deposition processing, and on day two will be running tutorial sessions, allowing plenty of time for delegates to ask questions. Following this there will be tours of the Kavli Nanoscience Institute's cleanroom facility.
Comments Prof Oskar Painter, Co-Director, Kavli Nanoscience Institute, Caltech, "Both Oxford Instruments Plasma Technology and the KNI aim to push the state-of-the-art beyond current capabilities in nanofabrication. The KNI has pursued aggressive acquisition of strategic instrumentation for advanced nanofabrication capabilities, including a number of Oxford Instruments systems that are successfully installed and producing great results for our researchers. Our multi-user laboratories and clean rooms for nanostructure synthesis, fabrication, and characterization are available to users from academia, government and industry."
There is no charge for this event but booking is essential:
http://www.kni.caltech.edu/calendar/workshops/etch-tech-2012/index.html
