MicroSense Secures Multiple Orders For 300mm MRAM Metrology
MicroSense, LLC has received a number of customer orders for its
MRAM (Magnetoresistive Random Access Memory) magnetic metrology systems from
global semiconductor manufacturers.
These metrology tools characterise the magnetic properties of multi-layer wafers used in the development and manufacturing of perpendicular MRAM.
"We have shipped a number of first generation MRAM metrology tools since 2004, but the industry had difficulty scaling for several years," said Tom McNabb, President and COO of MicroSense. "Now with STT-MRAM (Spin Transfer Torque MRAM) emerging as the solution to the scaling problem, it appears the industry is once again in motion. This has resulted in a number of new MRAM tool orders for MicroSense. We are pleased to announce receiving orders for our new 300mm Polar Kerr (out-of-plane) MRAM metrology system, in addition to orders for our KerrMapper (in-plane) tool and our Vibrating Sample Magnetometers (VSM)."
"These systems are the world's first full 300mm wafer,
non-contact magnetic metrology systems for perpendicular and in-plane MRAM, providing
critical process control information on the multi-layer magnetic stack that is
an essential component of MRAM fabrication," added Ferenc Vajda, Ph.D.,
Director of Magnetic Metrology at MicroSense.
"These metrology tools
utilise our proprietary capabilities in magnetic field control and complex
algorithms that result in world leading performance. Our systems can measure
wafers up to 300mm and are applicable to both R&D and production
needs," concluded Vadja.
