Memory Asian Manufacturer Selects Nova Metrology Tool
Nova Measuring Instruments Ltd., a provider of stand-alone metrology and integrated metrology solutions to the semiconductor process control market, has an order from a memory manufacturer in Asia.
Nova says its high-end T600 stand alone tool was selected for the development of future generations of advanced NAND technology. The tool is designed to assist memory manufacturers in developing next generation cutting edge technology in the 1xnm tech node.
Nova's T600 multi-channel configuration features normal and oblique incidence spectroscopic reflectometry that is optimised for best sensitivity on small features including at the bottom of high-aspect-ratio structures. Combined with the NovaMARS innovative modeling software capabilities, the T600 provides the metrology precision and accuracy as well as application development flexibility needed for the development of most advanced technology nodes.
The Nova T600 is suited
for process control of complex vertical structures for the 2x technology node
and beyond and was developed in collaboration with leading device makers. Nova
says it has shown breakthrough metrology performance on critical device
parameters, including up to a four times increase in measurement sensitivity on
critical profile parameters of advanced 3D applications.
"We are delighted with this vote of confidence from such a
strategic customer. Our growing presence in advanced technology companies
provides strong evidence of our technological superiority and our ability to
address successfully the challenging demands of most advanced tech nodes. The T600
configuration is built to assist our customers to have quick application
turnaround and is suitable for the most challenging development work required
in these cases", said Gabi Seligsohn, President and CEO of Nova.
