Carl Zeiss Proves Photomask Metrology Tools Can Be Compact
Carl Zeiss is marketing its new generation photomask registration and overlay metrology system, PROVE Compact.
The tool has a footprint 30 percent smaller than its predecessor.
Through a new design concept the system now consists of one main unit and two satellites, which can be clearly separated. According to Carl Zeiss, with the new dimensions, Mask Shops gain a higher flexibility and, even more important, save costs of ownership.
The first PROVE Compact tool was ordered by a US-based semiconductor manufacturer. The shipment took place in mid July and is currently in installation. A second system will be delivered shortly.
"Our customers benefit massively from the new footprint since it saves a lot of expensive cleanroom space. After eighteen months only we are able to launch the new generation PROVE Compact. This short development project demonstrates the excellent team work within Carl Zeiss and our major subcontractors," says Dr. Dirk Beyer, Product Manager PROVE Compact at Carl Zeiss SMS GmbH.
The PROVE Compact system measures registration and overlay on photomasks with sub-nanometer repeatability and accuracy meeting your pattern placement requirements for todays and future nodes.
