Axcelis Wins Multiple Plasma Tool Order For NAND Flash
Massachusetts based Axcelis Technologies has received a multiple system follow-on order from a major semiconductor chip manufacturer.
The company will supply its Integra RS plasma dry strip systems for the production of 3x nm and below NAND Flash devices at leading edge fabs in Asia and the US. The systems began shipping this month.
Mary Puma, chairman and CEO commented, "We're excited to expand our installed base with this industry leader and support their evolving manufacturing needs. The Integra dry strip system has demonstrated superior manufacturing productivity for our memory customers, combined with process technologies extendable to the most advanced device nodes.
They value the ability of the system to efficiently handle standard dry strip processes together with critical cleaning steps over sensitive, exposed metals, on a single, modular wafer handling platform. This unique combination of productivity and process performance makes the Integra the ideal choice for high volume manufacturing of leading edge memory."
Axcelis is a developer of plasma cleaning and dry strip technology used in non-oxidising solutions for 28nm and below, single chamber and small substrate size applications in the MEMS, LED, and packaging markets.
