Entegris Inaugurates European Plant For High Purity Coatings
Entegris, Inc. has opened a new facility to provide specialised silicon and diamond-like coatings to support Europe's semiconductor, industrial, and plastics industries.
Located in the Techlid economic hub in Lyon, France near the heart of Europe's centre for nanotechnology activity and plastics production, the new Entegris facility expands the firm's capabilities in the U.S. and Asia for its silicon and diamond-like carbon (UltraC) families of coatings.
Entegris' silicon coatings are high-purity, dense and microconformal coatings with very low residual stress. The company says its UltraC coatings are extremely smooth, highly lubricious, and are harder than tool steel and chrome and that both families of coatings are highly resistant to corrosion.
To manufacture these coatings, the facility will use a proprietary Plasma Enhanced Chemical Vapour Deposition (PECVD) process that ensures no change to the hardness of the substrate, even to those processed at low temperatures.
These coatings are ideal for a variety of high purity processes and components for applications including semiconductor processing chambers and materials handling.
The new facility will also house the company's European office to support the sale of line of POCO graphite and SUPERSiC silicon carbide products.
