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Imec & CANON ANELVA To Develop STT-MRAM

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CANON ANELVA Corp., and Belgian research centre imec will collaborate on advanced STT-MRAM (spin-transfer torque magnetoresistive random access memory) research and development.

CANON ANELVA is a supplier of processing equipment for the semiconductor device manufacturing industry.

The collaboration will run in the framework of imec's R&D program on advanced emerging memory technologies.

Imec's research program aims at exploring the full technology potential of STT-MRAM including performance beyond 1ns and scalability beyond 10 nm for embedded & stand alone applications.

STT-MRAM appears to allow for much higher densities than the those of the first generation MRAM technology. However, it is lagging behind flash for the same reasons as FeRAM "“ enormous competitive pressures in the flash market.

Research will be performed on CANON ANELVA's deposition tool which has been installed in imec's 300mm clean room. The tool complements imec's advanced STT-MRAM equipment cluster.

Combined with imec's advanced litho-cluster and its material engineering capabilities, imec's industrial partners now have access to a complete 300mm STT-MRAM-dedicated processing capability. The collaboration between imec and CANON ANELVA will also include the establishment of the baseline process for magnetic tunnel junctions (MTJs), joint R&D on thin film deposition and stack engineering for high-density STT-MRAM, and the development of integrated STT-MRAM devices.

"We are very pleased to co-develop with CANON ANELVA the processes for scaling STT-MRAM technology, a promising alternative high-density memory technology for the existing memory technologies such as SRAM and DRAM," says Luc Van den hove, CEO at imec. "The first excellent lab tests on CANON ANELVA's MTJs confirm the joint ambition of imec and CANON ANELVA to significantly move forward with scaling STT-MRAM devices, bringing this technology closer to industrial viability."

"Working with imec, a premier R&D facility on advanced memory scaling, is an exciting opportunity for CANON ANELVA," comments Junro Sakai, President and Representative Director at CANON ANELVA.


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