Axcelis & Lam Unite on Ion Implant, Dry-Strip, and Etch Research
Axcelis Technologies, Inc. and Lam Research Corp. are collaborating to focus on ion implantation, etch processes, and photoresist strip applications.
These include material modification implants and high-dose implant strip (HDIS).
Separately, Axcelis decided that it will exit the dry-strip business and part from its dry-strip intellectual property and technology, including the advanced non-oxidising process technology of its Integra product line, to Lam Research.
This will allow Axcelis to focus exclusively on the ion implantation market.
Axcelis will continue to ship its 300 mm dry-strip products through August 2013, and support the large Axcelis installed base indefinitely, including all existing parts and service contracts.
For Lam, apart from acquiring all of Axcelis' dry-strip IP, the agreement will allow cooperation with Axcelis in the area of advanced implant technology focused on further strengthening its etch, dry-strip, clean, and deposition offerings.
Contamination from improperly prepared surfaces, particularly after high-dose implants, can affect the deposition and adhesion of subsequent layers, impacting device yield. Advanced semiconductor nodes can use material modification implant techniques in conjunction with advanced etch processes to achieve improved device performance.
Mary Puma, chairman and CEO of Axcelis says, "Axcelis is excited to be working closely with Lam under the collaboration agreement to provide customers solutions where implant, etch, and dry-strip processes interact. Axcelis made the strategic decision to focus on the ion implantation market and we believe that Lam Research, already a leader in dry-strip, is the best company to utilise its existing dry-strip products to provide both Axcelis and Lam customers with continued access to superior dry-strip technology."
The semiconductor industry is facing a challenging environment of technology inflection points across multiple device types occurring over the next several years.
"Given the high level of technical and economic challenges across the industry, partnerships and collaboration between companies with complementary technologies can add meaningful value to customers by delivering better solutions, faster," explains Martin Anstice, president and CEO of Lam Research.
