News Article
Henniker multi-tasking deposition systems take off
Henniker Scientific has released a new range of multi-technique deposition systems for
nanomaterials research.
The family of systems offer the flexibility of several techniques in a single chamber. One of these is pictured below.
HSP 370 deposition system
The company says its latest multi-deposition systems are ideal for both small scale production and R&D prototyping for nanomaterials research
All systems in the range feature a universal ‘quick-change’ source flange which can be configured for specific deposition techniques or combination of techniques including magnetron, thermal, e-beam or combination sources.
Henniker says the systems provide a multi-technique and deposition system suited for both small scale production and R&D prototyping.
Also, each system configuration has many viewports and equipment ports for ancillary instruments such as ion sources for sample cleaning, thickness monitors and load lock entry.
PC control and data acquisition on system is available as an option and also allows ancillary techniques and devices to be fully integrated.
Efficient water cooling and differentially pumped seals guarantee a base pressure of E-9 mbar which, together with sample manipulator options, provide the widest possible access to substrate conditions, including full 360 degree rotation with stage heating and cooling.
