UMC wins grant for Edwards' vacuum pump
Edwards and UMC collaborated to apply for a grant from Singapore's National Environment Agency GREET project
United Microelectronics Corporation (UMC) has received a grant offer from Singapore National Environment Agency.
The Grant of Energy Efficiency Technologies (GREET) incentive is being offered for UMC's use of Edwards' environmentally-friendly iXL120 dry vacuum pump.
According to Kirel Tang, General Manager for Edwards' Southeast Asia operations, "We worked closely with the Singapore Branch of UMC on their submission. We are delighted that they achieved this recognition, which is the first for a vacuum pump, and we look forward to a partnership of continued success."
As part of their long-standing relationship, Edwards and UMC's Singapore Branch worked collaboratively to apply for this grant.
Singapore's National Environment Agency (NEA) sanctioned this grant under the GREET (Grant for Energy Efficient Technologies) project. With the offer of this grant, Edwards says it's iXL120 is the first dry vacuum pump to gain this recognition for its environmentally friendly operation.
"As a responsible corporate citizen, UMC is constantly upgrading its facilities to achieve greener, more sustainable manufacturing," adds Johnson Liu, Fab Operation Director at UMC's Fab 12i in Singapore. "The transition to the Edwards iXL120 pump is not only expected to result in more environmentally friendly production for Fab 12i, but will help us reduce operating costs as well."
Edwards says its compact, low energy iXL120 dry vacuum pump is one of the smallest and lightest pumps available for load-lock and clean applications. The pumps' Green Mode, in which power consumption is reduced by up to 95 percent, helps lower both cost-of-ownership and environmental impact.
The high-throughput pump provides the fastest pump-down in its class; while its low energy consumption, small footprint and minimal maintenance requirements help to reduce its overall cost-of-ownership.
UMC provides advanced technology and manufacturing for applications spanning many major sectors of the IC industry. The company's foundry solutions allow chip designers to provide 28nm poly-SiON and gate-last high-K/metal gate technology, mixed signal/RFCMOS, and a wide range of specialty technologies.
