BOC gets Chinese contracts
More than 30 chemical and slurry systems will be supplied, including high-volume chemical delivery and lorry systems, chemical blending modules, the patented iSIS 2000 slurry blending and distribution system and the ChemControl configurable control system (patent pending).
The bulk gas pad will feature a BOC ultra-high purity nitrogen generator. In addition, storage, distribution and purification will be provided for nitrogen, oxygen, argon, helium and hydrogen gases. The supply will also include CDA (clean dry air).
More than 50 speciality gas systems will be installed, including a number of bulk special gas systems and point-of-use abatement units. The bulk gas distribution systems will include the mains and submains for more than ten different bulk gases.
BOC Edwards says that it has won significant business at all the major semiconductor production sites in China, now numbering ten major producers. Most chip manufacturers are concentrated near Shanghai and Beijing, where the Chinese government has a focus on high technology industrial development. More than 20 new wafer fabs are planned for China in the next five years, half to be constructed in the Shanghai area.