News Article
German MEMS foundry kits up
German microsystem foundry microFAB Bremen has ordered a complete micro-electro-mechanical system (MEMS) process line from SUSS MicroTec. Some of microFAB's key products include high quality MEMS based silicon microphones for hearing aids and mobile phones.
German microsystem foundry microFAB Bremen has ordered a complete micro-electro-mechanical system (MEMS) process line from SUSS MicroTec. Some of microFAB's key products include high quality MEMS based silicon microphones for hearing aids and mobile phones.
The order includes an MA150 mask aligner, an SB6e substrate bonder and a MA/BA6 mask/bond aligner. MA/BA6 can be retrofitted with either a lithography or a bonding option. The bonder system demonstrates submicron post-bond alignment with a laser pre-bond.