+44 (0)24 7671 8970
More publications     •     Advertise with us     •     Contact us
*/
News Article

Nikon sets out immersion schedule

Nikon has completed capability studies on fundamental technologies related to immersion lithography. The feasibility studies have taken half a year. The company says that it has found no showstopper that might prevent the technology’s realisation.
Nikon has completed capability studies on fundamental technologies related to immersion lithography. The feasibility studies have taken half a year. The company says that it has found no showstopper that might prevent the technology’s realisation.

It has been decided to move ArF immersion lithography to the development stage with a view to productisation. A "product introduction schedule" is given:

* Later half of 2004: Completion of engineering evaluation model of ArF immersion lithography and start of user evaluations. Development will be on the basis of Nikon’s currently marketed ArF exposure tool NSR-S307E, with a projection lens NA of 0.85.

* 2005: Completion of pre-production model based on successor of NSR-S307E, with an NA of 0.92.

* 2006: Sales of mass-produced model with an NA greater than 1.0.

Higher numerical aperture (NA) lenses mean better resolution. NA is limited to less than 1 in air. Liquids such as water, with a refractive index greater than 1, open the road to NAs greater than 1. In an immersion lithography exposure system using an ArF laser as the light source, de-ionized (DI) water with a refractive index of 1.44 is introduced between the projection lens and the wafer.

Although immersion has been used for a long time to boost resolution in microscopes, only in recent years has serious research started for applications to lithography exposure tools.

×
Search the news archive

To close this popup you can press escape or click the close icon.
Logo
×
Logo
×
Register - Step 1

You may choose to subscribe to the Silicon Semiconductor Magazine, the Silicon Semiconductor Newsletter, or both. You may also request additional information if required, before submitting your application.


Please subscribe me to:

 

You chose the industry type of "Other"

Please enter the industry that you work in:
Please enter the industry that you work in: