Europe pushes into China MEMS market
Alcatel Micro Machining Systems (MMS) has completed installation of its "I-Speeder" deep plasma etch tool at the Shanghai Institute of Microsystem and Information Technology (SIMIT) in China. SIMIT is a division of the Chinese Academy of Science (CAS). The SIMIT centre has a 1,600m2 dedicated micro-electro-mechanical system (MEMS) Class 100 cleanroom.
Alcatel’s installed base in China now includes Changchung Institute of Optics - CAS, CNT (Harbin), Sichuan Institute (Chongking), Nanjing Electronic Devices, HSRI (Hebei) and the Beijing base of the SICAS packaging consortium.
EV Group (EVG) has installed several advanced wafer processing tools the Tsinghua-Foxconn Nanotechnology Centre at the National Tsinghua University (NTHU) in Beijing, China. The tools are an EVG101 resist coating system, an EVG101 develop system, an EVG301 cleaner, an EVG620 precision alignment system for double-side lithography and an EVG520HE hot embossing and nanoimprinting system.
