News Article
ITRI opts for SUSS embossing
The Taiwan research organisation ITRI has chosen a new wafer-level cold and hot embossing tool from SUSS MicroTec.
The Taiwan research organisation ITRI has chosen a new wafer-level cold and hot embossing tool from SUSS MicroTec.
The NPS 200 tool achieves a post-printing accuracy better than 1micron. An automatic alignment option enables submicron alignment of the substrate or wafer with respect to the stamp.
Using stamps or templates rather than optical lithography, the NPS 200 creates extremely small patterns for devices aiming at the optoelectronics and biotech markets such as optical grating couplers and membrane chips for filtration of bacteria or cells in the biomedical, pharmaceutical and food industries.
