Spectrometer sets bandwidth measurement record
The measurements took place at Positive Light in California. The US company’s Indigo-DUV 193nm laser is the only one a narrow enough spectral bandwidth to allow the LTB spectrometer’s performance to be verified.
The spectrometer was developed to meet increased demands on metrology in the lithography sector for excimer lasers operating at the 248nm, 193nm and 157nm wavelengths. The improvement of laser spectral bandwidth makes smaller lithography pattern sizes possible. Other applications are atom absorption spectroscopy and laser diode development.
The device also measures the width for 95% of the line’s energy (E95). The minimum for E95 measurements is given as 175fm. Echelle spectrometry makes it possible to quantitatively analyse the wings and the spectral vicinity of the laser lines.
The ELIAS III (Emission Line Analysing Spectrometer) tool is the latest patented model in a series of high-resolution spectrometers that LTB has jointly developed with the Institute for Spectrochemistry and Applied Spectroscopy (ISAS) Berlin. LTB has delivered more than 75 ELIAS series systems in the past three years.
