News Article
Sealing solution makes wafer processing more productive
New bonded door seals with Kalrez® perfluoroelastomer parts from DuPont Dow Elastomers make wafer processing more productive. Presented by DuPont Dow at Semicon Europa 2004 (stand B1.276) these seals are designed for etch, ash, HDPCVD, PECVD, SACVD and metal CVD wafer processing and outperform conventional O-rings in slit and gate valve door seal applications.
For more details: www.kalrez.com/bonded
DuPont Dow Elastomers S.A.
2, chemin du Pavillon
CH-1218 Le Grand-Saconnex
Geneva, Switzerland
Tel: ++41 22 717 4000
Fax: ++41 22 717 4001
Kalrez® is a registered trademark of DuPont Dow Elastomers
New bonded door seals with Kalrez® perfluoroelastomer parts from DuPont Dow Elastomers make wafer processing more productive. Presented by DuPont Dow at Semicon Europa 2004 (stand B1.276) these seals are designed for etch, ash, HDPCVD, PECVD, SACVD and metal CVD wafer processing and outperform conventional O-rings in slit and gate valve door seal applications.
For more details: www.kalrez.com/bonded
DuPont Dow Elastomers S.A.
2, chemin du Pavillon
CH-1218 Le Grand-Saconnex
Geneva, Switzerland
Tel: ++41 22 717 4000
Fax: ++41 22 717 4001
Kalrez® is a registered trademark of DuPont Dow Elastomers
