Macro and nano integration
LEO has been a wholly owned subsidiary of Carl Zeiss SMT since 2001, but the company’s origins can also be traced back to the Carl Zeiss Group over 60 years ago. Among the former LEO products is a photomask repair tool developed in co-operation with NaWoTec. This tool recently won the 2003 German Industry Innovation Award. Carl Zeiss hopes the move will give it access to nanotech growth markets in the USA and Asia - China in particular.
Among its technologies in this area is the new nanoimprint lithography technology. Carl Zeiss SMT AG owns exclusive rights for European distribution of this technology. As a result, it is in a key position to disseminate this technology initially for research, but in the future also for the industrial manufacture of nano structures.
