ST completes wastewater treatment evaluation
The four-month evaluation of the copper chemical mechanical planarisation (CMP) abatement technology was conducted at ST’s Rousset site in France using effluent generated by their 120nm copper process. Evaluation results showed that the BOC Edwards’ abatement solution removed copper ions from waste streams to levels below European environmental regulations without requiring solids pre-filtration. The approach proved to be cost effective and reduced overall water consumption compared with conventional copper CMP abatement technologies.
The copper ions in copper CMP effluent streams are biocides, chemical agents capable of destroying living organisms – hence the strict limits. The CuNoSS system uses proprietary fluidised bed technology (patent pending) that removes copper ions without trapping the suspended solids. This capability reduces overall wastewater treatment costs because only one solids removal system is required per fab.
The abatement system is compatible with both copper CMP waste streams and copper electroplating rinse water, and is available in 15, 30 and 45gpm facility configurations (1gallon=3.785litres).
