News Article
Immersing directions
International roadmaps are designed to ensure the industry moves forward together. Precious research resources are directed towards an agreed path allowing for competitive partnerships. Lithography is the major key to the success of continuing expectations in adding more complexity in less space. The last year has seen a dramatic shift in plans for lithography. The expected move to shorter wavelengths has not occurred and immersion lithography is suddenly seen as the technology to push current tools further. David Ridsdale asked the two biggest players in the lithography market, Europe's ASML and Japan's Nikon, about immersion lithography and its impact on the industry.
