News Article
Supercritical partnership
BOC Edwards has established a joint development programme with the IMEC European research centre in Belgium. The programme focuses on the application of supercritical CO2 (scCO2) cleaning processes for the manufacture of next-generation semiconductor devices.
BOC Edwards has established a joint development programme with the IMEC European research centre in Belgium. The programme focuses on the application of supercritical CO2 (scCO2) cleaning processes for the manufacture of next-generation semiconductor devices.
BOC Edwards has shipped an integrated supercritical CO2 processing system, including its DFP 200 high-pressure, single-wafer process module to IMEC. This supercritical CO2 technology demonstrator will be used in a three-year process development programme.
The application of scCO2 for all process steps where the use of water needs to be avoided will be assessed. The will start with the investigation of the use of scCO2 for the cleaning of advanced porous low-k materials. The low viscosity and surface tension of scCO2 allows for efficient cleaning of small feature sizes.
