News Article
Canadian researchers join EVG nano imprint consortium
The National Research Council of Canada's Industrial Materials Institute (NRC-IMI) joined the Nano Imprint Lithography (NIL) consortium that Austrian company EV Group (EVG) formed last year. The consortium is working to commercialise advanced NIL technologies.
The National Research Council of Canada's Industrial Materials Institute (NRC-IMI) joined the Nano Imprint Lithography (NIL) consortium that Austrian company EV Group (EVG) formed last year. The consortium is working to commercialise advanced NIL technologies.
Last autumn, the NRC-IMI purchased an EVG520HE semi-automated hot-embossing system to pattern surfaces for various applications, from bio-recognition to magnetic data storage. In addition, DALSA, an Ontario-based maker of processed silicon wafers and packaged silicon chips, purchased EVG's GEMINI wafer bonder cluster tool and a HERCULES thick-polymer lithography tool for high-volume MEMS manufacturing.
