News Article
Thickness measurement tool gains Novellus recognition
Israeli metrology tool developer Tevet Process Control Technologies has received an approved supplier designation from Novellus.
Israeli metrology tool developer Tevet Process Control Technologies has received an approved supplier designation from Novellus.
The recognition comes after a collaborative evaluation of TevetÕs In-situ Thickness Measurement System (IsTMS) by both Novellus Systems and by a Novellus customer. Following evaluation and testing by Novellus, the IsTMS has become a tool of record in a production fab.
The IsTMS uses large spot size broad band spectral reflectometry combined with proprietary algorithms to provide in-situ metrology.
