News Article
Hynix buys BOC fluorine generation
BOC Edwards will supply fluorine gas to Hynix Semiconductor's 300mm semiconductor manufacturing facility in Ichon, South Korea.
BOC Edwards will supply fluorine gas to Hynix Semiconductor's 300mm semiconductor manufacturing facility in Ichon, South Korea.
Due to its zero-impact on global warming, fluorine is becoming a popular material for cleaning chemical vapour deposition (CVD) chambers.
Supply of fluorine in high-pressure cylinders is often considered unacceptable by end users due to cost, handling and safety concerns Ð hence fluorine generation is a preferred technology.
Hynix is the sixth customer to install a BOC Edwards Generation-F fluorine system for use in semiconductor or liquid crystal display (LCD) manufacture.
