News Article
Mattson buys WAFERMAP site licence
German company Boin has shipped a site licence for its WAFERMAP 2.3 professional software to Mattson Thermal Products to allow for an unlimited number of users at one location.
German company Boin has shipped a site licence for its WAFERMAP 2.3 professional software to Mattson Thermal Products to allow for an unlimited number of users at one location.
WAFERMAP is used to collect, edit, analyse and visualise measured physical parameters on semiconductor wafers. WAFERMAP can import data files from various metrology tools such as ellipsometers, thickness gauges and four point probes.
The imported data can then be visualised or printed as line scans, contour plots, 2D or 3D plots or as a histogram. Several kinds of operation can be applied to the wafer maps such as rotation, shifting of the grid in the X or Y direction, or mirroring the data along the X- or Y-axis. It is also possible to compare different sets of data by adding, subtracting or dividing entire wafer maps. Maps can be exported to ASCII data files.
