News Article
Japanese firm to build new R&D centre
Japanese semiconductor equipment supplier Tokyo Ohka Kogyo has unveiled plans to build a new $62 million research and development facility at its Sagami Operation Centre. The company intends to use the six-storey 5,900m2 laboratory to speed up research into next-generation semiconductor products. The building will include a sub-ISO class 3.5 super cleanroom (class 3.0 US standard) and state-of-the-art equipment to carry out research on 45nm photolithography technology. The company is also considering installing lithography equipment based on liquid immersion exposure technology. The building is scheduled for completion in December 2005.
