Improved optical overlay registration and CD metrology system
"The IVS 155 continues the tradition of rock solid metrology." commented Neal Sullivan, Soluris vice president of technology. "We have tightened the precision and made a number of other upgrades that improve the system automation and functionality. The standard features on the IVS 155 such as RJG off line recipe creation and the structural metrology suite are in direct response to our customers needs."
"Soluris has been one of our most consistent and reliable vendors" said Nabil Alali, executive director of equipment engineering & fabrication operations at Jazz Semiconductor in Newport Beach California. "Their IVS series optical metrology systems are among the most reliable tools in the fab. That allows my engineers to focus their efforts on process, and not equipment issues. When we do need service, Soluris is attentive to our needs and delivers what they promise."
