News Article
AMD chooses Philips copper metrology tool
Philips Advanced Metrology Systems has won a multi-unit order from chip maker AMD for its Series 3300 copper metrology tool.
Philips Advanced Metrology Systems has won a multi-unit order from chip maker AMD for its Series 3300 copper metrology tool. AMD will use the metrology tool for on-line production monitoring of copper/low k processes at the companys 200mm and 300mm fabs in Germany.
The Series 3300 will help AMD improve process control and reduce manufacturing costs, said AMD lead engineer Thomas Ortleb.
"It is important that our solution is able to fulfil our demanding measurement requirements in a reliable and cost-effective way. The Philips AMS Series 3300 has proven capable of meeting our needs," said Thomas Ortleb, a lead engineer at AMD. "Not only does the Series 3300 help meet our needs today, but we expect it to be extendable to allow us to compete with our products as we move forward to more advanced technology nodes."
Philips Advanced Metrology Systems general manger Bill Gately said: "In todays increasingly competitive market, semiconductor manufacturers are faced with the challenge of controlling costs, improving yields and developing advanced manufacturing processes that implement the latest materials. Our tools were specifically designed for todays challenging copper processes, providing high throughput at low cost of ownership."
"It is important that our solution is able to fulfil our demanding measurement requirements in a reliable and cost-effective way. The Philips AMS Series 3300 has proven capable of meeting our needs," said Thomas Ortleb, a lead engineer at AMD. "Not only does the Series 3300 help meet our needs today, but we expect it to be extendable to allow us to compete with our products as we move forward to more advanced technology nodes."
Philips Advanced Metrology Systems general manger Bill Gately said: "In todays increasingly competitive market, semiconductor manufacturers are faced with the challenge of controlling costs, improving yields and developing advanced manufacturing processes that implement the latest materials. Our tools were specifically designed for todays challenging copper processes, providing high throughput at low cost of ownership."
