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Slovakian scientists scanning for partners

The Slovak Institute of Physics has developed and constructed a scanning capacitance scanning probe microscope (SPM) technique.

The Slovak Institute of Physics has developed and constructed a scanning capacitance scanning probe microscope (SPM) technique. While capacitance capabilities are offered by commercial SPMs, the new technique is based on a different patented principle that promises greater analytical possibilities.

The Slovakian microscope can be operated in normal atmosphere or in liquids, unlike the vacuum conditions required by scanning electron microscopes (SEMs). The scanning capacitance technique is suited to imaging conducting surfaces, with resolutions down to 10nm, or surfaces coated by insulating films where the resolution is somewhat reduced.

For the analysis of semiconductor structures, scanning capacitance microscopy is seen as the only non-destructive analysis tool, with resolutions meeting the industry requirements for future generations of integrated circuits.

The Slovakian scientists are seeking joint venture and license agreements with partners from the materials or semiconductor research sector and to supply advisory services at application sites.

Contact Peter Kopkas, BIC Bratislava kopkas@bicba.sk

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