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BOC Edwards will supply fluorine gas to Hynix Semiconductor's 300mm semiconductor manufacturing facility in Ichon, South Korea.
BOC Edwards will supply fluorine gas to Hynix Semiconductor's 300mm semiconductor manufacturing facility in Ichon, South Korea. Due to its zero-impact on global warming, fluorine is becoming a popular material for cleaning chemical vapour deposition (CVD) chambers.

Supply of fluorine in high-pressure cylinders is often considered unacceptable by end users due to cost, handling and safety concerns - hence fluorine generation is a preferred technology. Hynix is the sixth customer to install a BOC Edwards Generation-F fluorine system for use in semiconductor or liquid crystal display (LCD) manufacture.

Singapore foundry Chartered Semiconductor Manufacturing is implementing PDF Solutions' Integrated Yield Ramp (IYR) and Characterisation Vehicle (CV) infrastructure at the 300mm Fab 7. The aim is to expedite Chartered's process ramp of 90nm silicon-on-insulator (SOI) and bulk CMOS technologies simultaneously. PDF Solutions' IYR infrastructure combines patented methodologies.

Cross-functional service teams work to deliver yield, performance, and reliability improvements to any stage of integrated circuit manufacturing.

The CV Infrastructure includes CV test chips, pdFasTest hardware and pdCV software. These enable fast isolation and repair of systematic and random physical failure mechanisms that limit process capability and yield.

The Sandia US national laboratory is to purchase 12 VERSALINE etch and deposition systems from Unaxis Wafer Processing. The tools will be used at Sandia's Microsystems and Engineering Sciences Applications (MESA) facility for micro-electromechanical system (MEMS) and III-V compound semiconductor applications. VERSALINE modules include advanced inductively coupled plasma (ICP) and reactive ion (RIE) etch and plasma-enhanced chemical (PECVD) and physical (PVD) vapour deposition.

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