News Article
Standards
SEMI has published six new technical standards applicable to the semiconductor, flat panel display and MEMS manufacturing industries.
SEMI has published six new technical standards applicable to the semiconductor, flat panel display and MEMS manufacturing industries.
Included in the new standards are specifications for liquid carbon dioxide cleaning (SEMI C55-1104), test methods for RF output power for wafer processing systems (SEMI E136-1104), micro identification marking for 300mm wafers (SEMI T14-1104), and procedures for improving device traceability (SEMI T13.1-1104 & SEMI T13.2-1104).
