News Article
Sales & orders
Taiwanese DRAM manufacturer Inotera Memories has ordered more than 60 RVP-300plus vertical furnaces for its new 300mm fab and a Pantheon single-wafer ALD tool from Aviza Technology.
Taiwanese DRAM manufacturer Inotera Memories has ordered more than 60 RVP-300plus vertical furnaces for its new 300mm fab and a Pantheon single-wafer ALD tool from Aviza Technology. The systems are being delivered for both stage one and stage two of Inotera's fab-equipment schedule. Inotera currently manufactures 110nm deep-trench DRAM devices and plans to transition to both 90nm and 70nm production at its new 300mm fab.
Trikon Technologies received a repeat order for its Delta CVD dielectric system from WIN Semiconductors, a pure-play GaAs foundry. The system will be used for the production of HBT, pHEMT and mHEMT GaAs products on 150mm wafers.
