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TSMC looks to MEMS?

UK etch tool company Surface Technology Systems (STS) has received an order to supply TSMC with a cassette to cassette high-rate ASEHRM plasma etch system.
UK etch tool company Surface Technology Systems (STS) has received an order to supply TSMC with a cassette to cassette high-rate ASEHRM plasma etch system. The system will be installed into an existing 150mm line at TSMC Fab 2 in Hsinchu, Taiwan. STS sees the sale as being an early indication that TSMC is looking to micro-electromechanical system (MEMS) production as a likely future market sector.

The TSMC installation increases the number of STS systems in Taiwan (for all applications) to more than 35. In particular, STS systems are now installed in every MEMS foundry in Taiwan. Mutsuo Mukuda, vice chairman of STS, comments: "We see this order as evidence that MEMS manufacturing is a market assuming greater significance.

As the leader in deep silicon etch, STS continues to be the first to break new ground and as the market expands, STS will maintain its majority market share in this growing application area." STS is majority-owned (63%) by Sumitomo Precision Products.

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