News Article
Intellectual property
Dainippon Screen's semiconductor equipment operation has received a license for patent rights from Philips Electronics concerning Marangoni wafer drying technology.
Dainippon Screen's semiconductor equipment operation has received a license for patent rights from Philips Electronics concerning Marangoni wafer drying technology. The technique is to be used in the drying units to be installed on DNS' batch cleaning systems.
Marangoni drying uses isopropyl alcohol (IPA) under low temperature conditions. In Marangoni convection, the surface tension of the IPA changes its flow according to concentration and temperature distribution. High temperature IPA drying would cause problems for next generation device manufacturing. DNS will start shipping the batch cleaning systems equipped with the technology beginning in July 2004.
