News Article
Intellectual property
Varian Semiconductor Equipment Associates (VSEA) filed a patent infringement action against Japan's Nissin Ion Equipment in a US district court.
Varian Semiconductor Equipment Associates (VSEA) filed a patent infringement action against Japan's Nissin Ion Equipment in a US district court. Varian Semiconductor charges that Nissin's medium current ion implanter infringes Varian Semiconductor's US patents for "Ion Beam Scanning Method and Apparatus" and "High Speed Movement of Workpieces in Vacuum Processing".
Ernest Godshalk, president and chief operating officer of Varian Semiconductor, reports: "Currently, Varian Semiconductor is actively investigating other apparent acts of infringement in Europe."


