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1st Silicon of Malaysia has purchased Applied Materials' Centura SiNgen low-pressure chemical vapour deposition (LPCVD) and Centura Radiance rapid thermal processing (RTP) systems. The tools will be installed at 1st Silicon's Fab 1 foundry facility in Kuching, Malaysia, to develop an inter-poly oxide-nitride-oxide (ONO) dielectric gate stack.
1st Silicon plans to use the RTP system for both soak and spike anneals through at least two technology nodes to maintain precise control of dopant activation and electrical performance in transistor structures.
Dr John Nelson, CEO of 1st Silicon, says: "This equipment will help us to support our niche processes such as flash, embedded flash, image sensor and high voltage, in addition to standard logic and mixed signal devices."