News Article
Nanometrics hits out at KLA patent lawsuit
Nanometrics Incorporated, a supplier of advanced integrated and standalone metrology equipment for the semiconductor industry, today announced that it has received notice of a patent infringement lawsuit brought by KLA-Tencor.
Nanometrics Incorporated, a supplier of advanced integrated and standalone metrology equipment for the semiconductor industry, today announced that it has received notice of a patent infringement lawsuit brought by KLA-Tencor.
In a statement, the company said the lawsuit is primarily motivated by competitive concerns rather than a desire to protect KLA's intellectual property.
Nanometrics claims that its products do not infringe any KLA patents and promised to "aggressively" pursue its defence in court.
"We will defend ourselves from these claims and remain vigilant in protecting our own technology rights," stated Nanometrics chief executive officer John Heaton.
Nanometrics is a leader in the design, manufacture and marketing of high-performance process control metrology systems used in the manufacture of semiconductors, integrated circuits and flat panel displays.
In a statement, the company said the lawsuit is primarily motivated by competitive concerns rather than a desire to protect KLA's intellectual property.
Nanometrics claims that its products do not infringe any KLA patents and promised to "aggressively" pursue its defence in court.
"We will defend ourselves from these claims and remain vigilant in protecting our own technology rights," stated Nanometrics chief executive officer John Heaton.
Nanometrics is a leader in the design, manufacture and marketing of high-performance process control metrology systems used in the manufacture of semiconductors, integrated circuits and flat panel displays.
