Residual Gas Analysis by One Click
ULVAC residual gas analyzers –RGAs - combine simplicity of operation and high quality of measurement. By pressing only two buttons the result of the measurements appears on the integrated display. The RGA works without differential pumping system. The fully automatic QULEE measures residual gases with high accuracy and high resolution even at high pressure (1 Pa or less). The downtime as well as maintenance time are reduced by means of immediate process monitoring.
QULEE is compatible with a PC for data analysis and complicated process monitoring. The RGA is supported by the newly updated software QULEE QSC with its basic functions of peak-intensity monitoring, leak-testing and recipe-based monitoring.
The saving data and the operation of data acquisition is carried out by simple clicking. The simultaneous control of up to 8 sensors, measurement control my means of recipe-monitoring, basic leak test in the Helium leak testing modus are only some of the features which this software offers. QULEE and QSC find their applications in the production process and research and development in the semiconductor, optical and pharmaceutical industries and etc.
For further information please contact:
ULVAC GmbH
Carl-Zeiss-Ring 3
D-85737 Ismaning
Tel: +49 (89) 96 09 09 0
Fax: +49 (89) 96 09 09 96
E-mail: ulvac@ulvac.de
Or visit us at PRODUCTRONICA Hall A1. Stand 148.
Für weitere Fragen wenden Sie sich an:
ULVAC GmbH
Carl-Zeiss-Ring 3
D-85737 Ismaning
Tel: +49 (89) 96 09 09 0
Fax: +49 (89) 96 09 09 96
E-mail: ulvac@ulvac.de
Oder besuchen Sie uns auf der Messe PRODUCTRONICA HalleA1. Stand 148.
