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News Article

Japanese photoresist supplier to fill for Tok America order

Sela announced it has received an order from TOK America for its sample preparation equipment for a “tool matching” application.
Sela announced it has received an order from TOK America for its sample preparation equipment for a “tool matching” application. Several TOK America IC customers use Sela tools to analyse wafer samples for defect detection. TOK America, a photoresist supplier and subsidiary of Tokyo Ohka Kogyo, purchased the MC600 from Sela to match the capability of its customers in failure analysis and process monitoring.

The MC600 system achieves fully automatic, reliable and rapid cross sectioning of whole and partial wafers. Dedicated software enables automatic mapping and navigation to targets, and features automatic off-loading for immediate inspection. These features, together with high throughput (9 min/sample), high accuracy (less than 0.5 micron), and the excellent quality of the cross-section produced, significantly reduce the diagnostic cycle for both failure analysis and process monitoring.

Dave White, senior chemical engineer at TOK America stated, “The Sela tool has already made an impact in our FA lab, enhancing our capability to quickly and repeatably analyse sub-micron features across multiple resist technologies.”

Basic to all activities connected with defect identification and analysis, process monitoring, and characterisation is the need to prepare cross-sections. While the ability to identify the surface location of the problem has long been in hand, the bane of the industry has been the lack of a refined, controlled means of establishing a true cross-section so that the problem can be pinpointed at its source. With shrinking feature sizes and the increasing complexity of multi-layer architecture, the ability to pinpoint and expose the sub-surface source is becoming even more difficult. The tool has already been delivered to the TOK America facility in Hillsboro, Oregon.
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