Macrotron to strengthen its frontend division
Macrotron Scientific Engineering GmbH (MSE) announced the expansion of its Frontend division by offering thermal processing systems. MSE expand its Frontend division for semiconductor manufacturing and now offers a solution for rapid thermal processing (RTP) to the semiconductor industry.
With the KORONA, Kornic Systems offers state of the art equipment for various applications in the area of thermal processing such as STI densification, salicide, barrier metal and spike anneals. Fast ramp-up (up to 1250°C) and cool down minimises S/D-dopant and TED in spike anneal application.
To meet customer requirements for MCDL (minority carrier diffusion length) & bulk Fe contamination, the systems are qualified for donor annihilation process. Particle-free wafer rotation is possible by using a ferro-seal mechanism.
The EasyCluster software (Windows NT base) developed by Kornic can efficiently control the system. The reliability of this software has been demonstrated in worldwide customer sites in Asia.
