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Silicon MEMS tech to replace quartz resonators

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SiTime, a privately held Silicon Valley startup, has announced the availability of engineering samples of its SiT1xxx fixed frequency and SiT8002 programmable oscillator families based on its proprietary MEMS First and EpiSeal CMOS compatible processes.
SiTime, a privately held Silicon Valley startup, has announced the availability of engineering samples of its SiT1xxx fixed frequency and SiT8002 programmable oscillator families based on its proprietary MEMS First and EpiSeal CMOS compatible processes. The SiTime silicon resonator is an electro-statically driven mechanical device that has ppm performance similar to consumer grade quartz products and orders of magnitude better than today's best silicon clock oscillators. The company expects that the availability of these devices will quickly replace the existing quartz technology that currently dominates the market for a majority of electronic timing and frequency generation "clock" applications. The SiTime SiRes SiT1xxx and SiT8002 oscillator families generate frequencies between 1 to 125 MHz with excellent temperature and jitter performance and are packaged in tiny industry standard IC packages, which provide a significant cost advantage.

Robert Bosch, GmbH researchers Markus Lutz and Dr. Aaron Partridge in partnership with Prof. Tom Kenny of Stanford University discovered and developed a series of inventions definitively solving the temperature/frequency hysteresis, long-term stability, and packaging cost problems which have previously prevented the commercialisation of MEMS resonators. SiTime, under exclusive license from Robert Bosch, GmbH, was formed to make this technology a commodity on 200mm standard CMOS wafers.
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