Micromanipulator Introduces 300mm Reliability Probe Station
Designed specifically for WLR work, the 2200-US12-V0 station provides a complete, economical and practical 300mm solution for WLR applications. The 2200-US12-V0 station is designed for typical WLR tests such as: Electromigration, Metal Stress, Copper Via Reliability, Oxide Wearout (TDDB), HCI, NBTI and PBTI.
These tests place extraordinary demands on an analytical wafer probing station. They require good probe contact at high temperatures for long periods, thermal chucks for accelerating failures, probes with high temperature stability and low current measurement capability and the ability to test multiple sites to generate statistically valid data.
The 2200-US12-V0 probe station features an integrated vibration isolation table, large area microscope X-Y movement, and flexible configurations for Multi-site probe cards, WAVE manipulator mounted Multi-site cards (like Celadon's Versa-Tile cards), and individual manipulators plus probe holders. The robust fixed position (slide-out loading capability) chuck mount supports 300mm thermal chucks for high temperature testing. The result is super chuck stability with quick and convenient wafer loading. Probe card positioning in X-Y 1" x 1" (25 x 25 mm) is provided through the platen and probe card holder, including theta control to align the probe card to the wafer. The 2200-US12-V0 station features fine Z control of the platen to provide high precision, stable probe overdrive.
