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News Article

Lasertec large area photomask defect inspection tool acquisition

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Image Technology, supplier of 1X full-field photomasks, announced that it has acquired a Lasertec Large Area Mask (LAM) defect inspection tool to enhance their full production line for advanced 9-inch photomasks.
The acquisition of this tool enables the company to offer sub-micron detection on 9-inch photomasks that can also be used to inspect advanced phase shift masks. The tool is capable of detecting surface contamination as well as inspecting photomasks between 4 to 9-inches in size.

Fernando Mendez, the company's VP of Sales & Marketing, stated, "Image Technology can now offer a full service photomask making facility that can guarantee a defect free full-field 9-inch production photomask. The acquisition of this tool puts Image Technology at the forefront of LAM technology ensuring a long-term reliable supply of 9-inch defect free photomasks for the back-end and packaging industry.

This latest capability is especially important to those companies with 65 nanometer and 45 nanometer technology nodes. Coupled with the Lasertec tool and our mask protection Technology (MPT), could have a significant yield advantage while driving down 1X full-field equipment cost-of-ownership".Alex Naderi, the company's President, stated.
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