News Article
Novellus supports microelectronic education in China
Novellus Systems, Inc., the productivity and technology leader in advanced process equipment for the global semiconductor industry, announced that it has donated a 200mm chemical mechanical planarization (CMP) tool to Tsinghua University in Beijing, China.
Novellus Systems, Inc., the productivity and technology leader in advanced process equipment for the global semiconductor industry, announced that it has donated a 200mm chemical mechanical planarization (CMP) tool to Tsinghua University in Beijing, China. The tool, initially targeted for oxide planarization, can be used to polish a variety of materials, including tungsten, copper and shallow-trench isolation (STI) films used in the manufacturing of integrated circuits (ICs).
The orbital CMP system will enable the integration of multi-level metallization into the University's semiconductor manufacturing process flow, and it will assist with furthering research and education efforts in micro-nano electronics IC processing and design. In addition to the tool donation, Novellus announced the sponsorship of a three-year professorship at Tsinghua University. The first year of the professorship will be awarded to Professor Zhiping Yu, deputy director of the Institute of Microelectronics of Tsinghua University (IMETU), and will support the study of device performance with the integration of low-k materials.
"As the electronics industry in China continues to thrive, the country's universities are challenged to accelerate their research and education programs to meet the demands of the growing industry," said Dr. Ming Xi, chief technology officer of Novellus Systems Asia. "At Novellus, we have a social responsibility in China – not just a commercial responsibility. We are focused on cultivating the region's rich talent base to further develop the semiconductor industry here. We are working with universities like Tsinghua here in Beijing and Fudan University in Shanghai to enhance their programs in core semiconductor design and processing disciplines, and to drive the advancement of IC design and processing in China."
"This generous tool donation and our ongoing relationship with Novellus will enhance our research capabilities and enable us to provide our students with as much training and exposure to semiconductor manufacturing technology as possible before they reach the workforce," said Professor Jun Xu, vice director of IMETU. "We are very grateful."
Novellus has been sponsoring the development of microelectronics education in China for the past several years. In 2003, the company donated a suite of copper semiconductor manufacturing tools to Fudan University. Additionally, Novellus continues to support semiconductor industry growth in China by sponsoring an annual interconnect symposium at Fudan University.
The orbital CMP system will enable the integration of multi-level metallization into the University's semiconductor manufacturing process flow, and it will assist with furthering research and education efforts in micro-nano electronics IC processing and design. In addition to the tool donation, Novellus announced the sponsorship of a three-year professorship at Tsinghua University. The first year of the professorship will be awarded to Professor Zhiping Yu, deputy director of the Institute of Microelectronics of Tsinghua University (IMETU), and will support the study of device performance with the integration of low-k materials.
"As the electronics industry in China continues to thrive, the country's universities are challenged to accelerate their research and education programs to meet the demands of the growing industry," said Dr. Ming Xi, chief technology officer of Novellus Systems Asia. "At Novellus, we have a social responsibility in China – not just a commercial responsibility. We are focused on cultivating the region's rich talent base to further develop the semiconductor industry here. We are working with universities like Tsinghua here in Beijing and Fudan University in Shanghai to enhance their programs in core semiconductor design and processing disciplines, and to drive the advancement of IC design and processing in China."
"This generous tool donation and our ongoing relationship with Novellus will enhance our research capabilities and enable us to provide our students with as much training and exposure to semiconductor manufacturing technology as possible before they reach the workforce," said Professor Jun Xu, vice director of IMETU. "We are very grateful."
Novellus has been sponsoring the development of microelectronics education in China for the past several years. In 2003, the company donated a suite of copper semiconductor manufacturing tools to Fudan University. Additionally, Novellus continues to support semiconductor industry growth in China by sponsoring an annual interconnect symposium at Fudan University.
