News Article
Aviza Technology Ships Single Wafer System to China
Aviza Technology, Inc. announced the shipment of its next-generation single wafer atomic layer deposition (ALD) system, Celsior, to China's leading
integrated circuit (IC) foundry. The Celsior system is targeted for
production of 90-nm DRAM chips.
"ALD is a critical technology to help achieve continued scaling of devices and meet stringent deposition challenges posed by 90-nm and below device structures," said Subrata Chatterji, Vice President and General Manager, ALD Business Unit of Aviza Technology, Inc.
