Integrated Sensing Systems buys OAI’s optical backside mask aligner
The Model 800MBA Aligner has been chosen by ISSYS for use in the manufacturing of advanced micro-machined devices.ISSYS is expanding its MEMS production capability to meet increased customer demand and new product introductions.
"The Model 800MBA provides an extremely attractive lithography package on both an economic and technical performance basis. Said Dr. Nader Najafi, President of ISSYS. "The new optical back-side aligner allows us to expand our production capability and better serve our customer base."
"After extensive testing and comparisons, ISSYS chose the OAI Model 800MBA for its flexibility, adaptability for use with different size wafers, ease of maintenance, and overall pricepoint. OAI is pleased to work with ISSYS and to support its MEMS efforts," said Dr. Charles Turk, President of OAI.