Silicon Microstructures move into high-volume MEMS pressure sensors
The company's pressure sensors – including its ultra-small SM 5108, measuring only 0.65 x 0.65 mm2 – are used extensively in automotive, medical and heating, ventilation, and air conditioning (HVAC) markets. The sensors range from low-pressure devices that measure human respiration to high-pressure devices designed for tire pressure monitoring systems (TPMS) and scuba diving air tanks. The upgrade and qualification of the six-inch line was completed without an interruption in production.
Besides being able to accommodate larger wafers, the manufacturing line contains new equipment that enables more precise and clean cassette handling, etching and depositions for higher performance and reliability. The company's longstanding history with pressure sensor development and production has resulted in highly stable processes that can be adapted for multiple products, while allowing rapid turnaround times. Attention to design-for-manufacture and process control has enabled the company to offer greater integration and size reduction for various devices.
"The demand for cost-effective, accurate pressure sensors is growing across multiple markets and our high-volume MEMS production is our response to this need," said Jim Knutti, president of Silicon Microstructures, Inc. "With SMI's increased capacity, we continue to enable new MEMS markets and opportunities and expect to see steady growth over the long term."
