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Rudolph Technologies and Tokyo Electron announce technology agreement

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Rudolph Technologies and Tokyo Electron Limited announced an agreement between the two companies that will provide Tokyo Electron (TEL) worldwide distribution rights for Rudolph's integrated lithography inspection technologies, to be included within TEL's coater/developer.

"This agreement provides full distribution responsibilities to TEL. Rudolph and TEL recognize customers' preference for streamlined communications and quick resolution to any issues that may arise—both companies were in complete agreement that a single party providing a total package solution of sales and support would be the most straightforward arrangement to accomplish this goal," said Toshi Nishigaki, TEL's Director of Clean Track Sales and Marketing.

"We are pleased to have established such a special relationship with TEL for our integrated lithography approach," said Ardy Johnson, Rudolph's Vice President of Marketing.

"We are particularly excited that this relationship is defined for the long term, and addresses possible next-generation integrated inspection technologies. There has been a consistent demand in the semiconductor equipment industry to date for faster inspection with higher optical resolution capability that captures new breeds of defects."

Johnson added, "This integrated lithography offering compliments our own direct standalone approach very nicely, providing a complete lithography solution for our customers."

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