BOC Edwards and Aviza Technology joint ALD agreement
The collaboration will utilize BOC Edwards' expertise in chemical precursor formulation and Aviza's advanced ALD hardware technology to optimize deposition processes for high-k materials and metals.
"We are excited about this opportunity to work with Aviza, a leader in the ALD market, to develop innovative ALD solutions for next generation manufacturing processes," said Atul Athalye, Director of Technology, Electronic Materials, at BOC Edwards. "The ultimate beneficiaries of our combined efforts will be our customers, as we aim to provide them with optimized process technology that will achieve reduced cost and higher yields."
BOC Edwards' new line of Flex-ALD precursors enable the deposition of very pure thin films and extending the range of ALD compatible compounds to include heavier elements not previously available. These novel precursors can reduce the cost and improve the efficiency of ALD processes by increasing precursor utilization, providing stable and consistent delivery without decomposition or condensation, and increasing growth rates for higher throughput. The Flex-ALD precursors will be evaluated as part of the JDA with Aviza before full commercial release.
"Strategic partnerships with established technology leaders in the semiconductor supply chain is an integral part of Aviza's advanced application activities," said Helmuth Treichel, Vice President, Advanced Applications of Aviza Technology, Inc. "This partnership with BOC Edwards will support our advanced ALD film development efforts to offer a diverse set of films for multiple IC applications. We believe the combination of BOC Edwards' Flex-ALD precursors and our ALD hardware technology expertise will deliver to global IC makers added capability to incorporate in their advanced manufacturing."
